Kosaka Table Rotation Type Roundness Tester
Model EC1550H
| Specification | Details |
|---|---|
| Rotational method | Porous Static Air bearing |
| Rotational Accuracy Theta Axis | (0.02 + 0.0004h) µm, where h is height from table |
| Rotational Accuracy R-Axis | (0.02 + 0.0006R) µm, where R is radius from rotation center |
| Table Size | Ø160mm |
| Centering range | ± 2 mm |
| Tilting Range | ± 1° |
| Measuring Size | Ø368mm |
| Loading Size | 450mm |
| Loading capacity | 25 kg |
| Column Straightness | 0.25 µm/100mm |
| Column Parallelism | 0.8 µm/200mm |
| Vertical Motion | 250mm |
| Pickup Force | Within 100 mN |
Model EC1850H
| Specification | Details |
|---|---|
| Rotational method | Porous Static Air bearing |
| Rotational Accuracy Theta Axis | (0.02 + 0.00035H) µm, where H is height from table |
| Rotational Accuracy R-Axis | (0.02 + 0.00035R) µm, where R is radius from rotation center |
| Table Size | Ø160mm |
| Centering range | ± 2 mm |
| Tilting Range | ± 1° |
| Measuring Size | Ø368mm |
| Loading Size | 450mm |
| Loading capacity | 25 kg |
| Column Straightness | 0.25 µm/100mm |
| Column Parallelism | 0.8 µm/200mm |
| Vertical Motion | 250mm |
| Pickup Force | Within 100 mN |
Model EC2500H
| Specification | Details |
|---|---|
| Rotational method | Porous Static Air bearing |
| Rotational Accuracy Theta Axis | (0.02 + 0.0004H) µm, where H is height from table |
| Rotational Accuracy R-Axis | (0.02 + 0.0006R) µm, where R is radius from rotation center |
| Table Size | Ø160mm |
| Centering range | ± 2 mm |
| Tilting Range | ± 1° |
| Measuring Size | Ø368mm |
| Loading Size | 450mm |
| Loading capacity | 25 kg |
| Column Straightness | 0.25 µm/100mm |
| Column Parallelism | 0.8 µm/200mm |
| Vertical Motion | 250mm |
| Pickup Force | Within 100 mN |
Pickup Orientations
Porous Static Air Bearing Table is floated by air via millions of tiny holes
(8-10um) which provides stable and high accuracy
